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Liu, Dongping ; Benstetter, Günther ; Lodermeier, Edgar ; Zhang, Jialiang ; Liu, Yanhong ; Vancea, Johann

Filtered pulsed carbon cathodic arc: Plasma and amorphous carbon properties

Article

Liu, Dongping, Benstetter, Günther, Lodermeier, Edgar, Zhang, Jialiang, Liu, Yanhong and Vancea, Johann (2004) Filtered pulsed carbon cathodic arc: Plasma and amorphous carbon properties. Journal of Applied Physics 95 (12), pp. 7624-7631.



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Details

Item typeArticle
Journal or Publication TitleJournal of Applied Physics
PublisherAMER INST PHYSICS
Place of PublicationMELVILLE
Volume95
Number of Issue or Book Chapter12
Page Rangepp. 7624-7631
Date2004
Date of publication19 Dec 2024 15:14
InstitutionsPhysics > Institute of Experimental and Applied Physics
Identification Number
ValueType
10.1063/1.1753081DOI
KeywordsDIAMOND-LIKE-CARBON; ATOMIC-FORCE MICROSCOPY; VACUUM-ARC; DISCHARGE METHOD; ION-BOMBARDMENT; THIN-FILMS; DEPOSITION; COATINGS; ENERGY; BEAMS;
Dewey Decimal Classification500 Science > 530 Physics
StatusPublished
RefereedYes, this version has been refereed
Created at the University of RegensburgYes
Item ID71503

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