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Influence of the incident angle of energetic carbon ions on the properties of tetrahedral amorphous carbon (ta-C) films
Liu, Dongping, Benstetter, Günther, Lodermeier, Edgar and Vancea, Johann (2003) Influence of the incident angle of energetic carbon ions on the properties of tetrahedral amorphous carbon (ta-C) films. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21 (5), pp. 1665-1670.Date of publication of this fulltext: 19 Dec 2024 15:26
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| Item type | Article | ||||
| Journal or Publication Title | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | ||||
| Publisher: | A V S AMER INST PHYSICS | ||||
|---|---|---|---|---|---|
| Place of Publication: | MELVILLE | ||||
| Volume: | 21 | ||||
| Number of Issue or Book Chapter: | 5 | ||||
| Page Range: | pp. 1665-1670 | ||||
| Date | 2003 | ||||
| Institutions | Physics > Institute of Experimental and Applied Physics | ||||
| Identification Number |
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| Keywords | DIAMOND-LIKE-CARBON; DEPOSITION; FORCE; MICROSCOPE; WEAR; | ||||
| Dewey Decimal Classification | 500 Science > 530 Physics | ||||
| Status | Published | ||||
| Refereed | Yes, this version has been refereed | ||||
| Created at the University of Regensburg | Yes | ||||
| Item ID | 72099 |
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