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Epitaxial growth and patterning of sputtered Fe films on GaAs(001)

Kreuzer, S. ; Prügl, K. ; Bayreuther, Günther ; Weiss, Dieter


Fe(001) films, 10�100 nm thick, were epitaxially grown by magnetron sputtering on GaAs(001) and on 100-nm-thick Au(001) buffer layers in an UHV-based sputtering system. Excellent epitaxy is inferred from X-ray diffraction measurements and the magnetic anisotropy of the films. From X-ray ö-scans, the epitaxial relationships Fe[100]GaAs[100] and Fe[100]Au[110] were determined. Magnetic ...


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