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Planar Hall sensors for micro-Hall-magnetometry

Rahm, M, Raabe, Jörg, Pulwey, Ralph, Biberger, Josef, Meier, C, Wegscheider, Werner and Weiss, Dieter (2002) Planar Hall sensors for micro-Hall-magnetometry. Journal of Applied Physics 91, p. 7980.

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In this work we present a new method to fabricate planar Hall sensors from GaAs� AlGaAs heterojunctions, which can be used to examine the local stray field at a specific section of a micron-sized magnet. Instead of mesa etching we implanted oxygen ions with an energy of 1.5 keV which deplete the two- dimensional electron gas underneath the exposed areas but leave the wafer flat. Planar ...


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Item type:Article
Institutions:Physics > Institute of Experimental and Applied Physics > Chair Professor Weiss > Group Dieter Weiss
Dewey Decimal Classification:500 Science > 530 Physics
Refereed:Yes, this version has been refereed
Created at the University of Regensburg:Yes
Item ID:7914
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