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Planar Hall sensors for micro-Hall-magnetometry

Rahm, M. ; Raabe, Jörg ; Pulwey, Ralph ; Biberger, Josef ; Meier, C. ; Wegscheider, Werner ; Weiss, Dieter


In this work we present a new method to fabricate planar Hall sensors from GaAs� AlGaAs heterojunctions, which can be used to examine the local stray field at a specific section of a micron-sized magnet. Instead of mesa etching we implanted oxygen ions with an energy of 1.5 keV which deplete the two- dimensional electron gas underneath the exposed areas but leave the wafer flat. Planar ...


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