Millimetre-wave generation with semiconductor superlattice mounted in cavity fabricated by UV- photolithography and galvanoforming

Häußler, Michael ; Schomburg, Ekkehard ; Batke, Jörg-Martin ; Klappenberger, Florian

; Weber, Alexander ; Appel, Helmut ; Renk, Karl Friedrich ; Hummel, H. ; Stroebl, B. ; Pavelev, Dimitri ; Koschurinov, Y.

Alternative Links zum Volltext:DOI

Bibliographische Daten exportieren

Zusammenfassung

A fabrication technique for a waveguide cavity with submillimetre dimensions is reported. The cavity was composed of galvanoformed nickel structures. A mould for the galvanoforming was made from a thick-film UV-photoresist. Using a semiconductor superlattice as active element, generation of millimetre-waves (170 GHz) was observed, but with subharmonics owing to yet insufficient suppression of ...