Direkt zum Inhalt

Giessibl, Franz J.

Atomic force microscopy with qPlus sensors

Giessibl, Franz J. (2024) Atomic force microscopy with qPlus sensors. MRS Bulletin 49, pp. 492-502.

Date of publication of this fulltext: 05 Mar 2024 06:42
Article
DOI to cite this document: 10.5283/epub.57842


Abstract

Atomic force microscopy is one of the most important tools in nanoscience. It employs an atomic probe that can resolve surfaces with atomic and subatomic spatial resolution and manipulate atoms. The qPlus sensor is a quartz-based self-sensing cantilever with a high stiffness that, in contrast to Si cantilevers, allows to oscillate at atomic radius amplitudes in the proximity of reactive surfaces ...

Atomic force microscopy is one of the most important tools in nanoscience. It employs an atomic probe that can resolve surfaces with atomic and subatomic spatial resolution and manipulate atoms. The qPlus sensor is a quartz-based self-sensing cantilever with a high stiffness that, in contrast to Si cantilevers, allows to oscillate at atomic radius amplitudes in the proximity of reactive surfaces and thus provides a high spatial resolution. This article reports on the development of this sensor and discusses applications in materials research.



Involved Institutions


Details

Item typeArticle
Journal or Publication TitleMRS Bulletin
Publisher:Springer Nature
Volume:49
Page Range:pp. 492-502
Date1 March 2024
InstitutionsPhysics > Institute of Experimental and Applied Physics > Chair Professor Giessibl > Group Franz J. Giessibl
Projects
Funded by: Deutsche Forschungsgemeinschaft (DFG) (89249669)
Funded by: Deutsche Forschungsgemeinschaft (DFG) (314695032)
Funded by: Deutsche Forschungsgemeinschaft (DFG) (14086190)
Identification Number
ValueType
10.1557/s43577-023-00654-wDOI
KeywordsCrystallographic structure, Microelectromechanical systems (MEMS), Quantum effects, Scanning probe microscopy (SPM), Sensor, Surface chemistry
Dewey Decimal Classification500 Science > 530 Physics
StatusPublished
RefereedYes, this version has been refereed
Created at the University of RegensburgYes
URN of the UB Regensburgurn:nbn:de:bvb:355-epub-578421
Item ID57842

Export bibliographical data

Owner only: item control page

nach oben