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Evaluation of a force sensor based on a quartz tuning fork for operation at low temperatures and ultrahigh vacuum
Hembacher, Stefan, Giessibl, Franz J. und Mannhart, Jochen (2002) Evaluation of a force sensor based on a quartz tuning fork for operation at low temperatures and ultrahigh vacuum. Applied Surface Science 188 (3-4), S. 445-449.Veröffentlichungsdatum dieses Volltextes: 13 Jul 2012 08:19
Artikel
DOI zum Zitieren dieses Dokuments: 10.5283/epub.25340
Zusammenfassung
The noise performance of the force sensor is crucial for optimizing the resolution in non-contact atomic force microscopy. Sensing forces in vacuum and low temperatures is even more demanding than at ambient conditions. Here we analyze the noise performance and the sensitivity of a force sensor based on a quartz tuning fork of which one of the prongs is fixed (qPlus sensor). The noise ...
The noise performance of the force sensor is crucial for optimizing the resolution in non-contact atomic force microscopy. Sensing forces in vacuum and low temperatures is even more demanding than at ambient conditions. Here we analyze the noise performance and the sensitivity of a force sensor based on a quartz tuning fork of which one of the prongs is fixed (qPlus sensor). The noise characteristic of the qPlus sensor, optical and piezoresistive detection schemes at room temperature are compared and the qPlus sensor is investigated at low temperatures. The frequency variation of quartz tuning forks as a function of temperature is experimentally determined for the temperature range from 4 to 300 K.
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| Dokumentenart | Artikel | ||||
| Titel eines Journals oder einer Zeitschrift | Applied Surface Science | ||||
| Verlag: | Elsevier | ||||
|---|---|---|---|---|---|
| Band: | 188 | ||||
| Nummer des Zeitschriftenheftes oder des Kapitels: | 3-4 | ||||
| Seitenbereich: | S. 445-449 | ||||
| Datum | 28 März 2002 | ||||
| Institutionen | Physik > Institut für Experimentelle und Angewandte Physik > Lehrstuhl Professor Giessibl > Arbeitsgruppe Franz J. Giessibl | ||||
| Identifikationsnummer |
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| Stichwörter / Keywords | Non-contact AFM; Low temperatures; qPlus sensor | ||||
| Dewey-Dezimal-Klassifikation | 500 Naturwissenschaften und Mathematik > 530 Physik | ||||
| Status | Veröffentlicht | ||||
| Begutachtet | Unbekannt / Keine Angabe | ||||
| An der Universität Regensburg entstanden | Unbekannt / Keine Angabe | ||||
| URN der UB Regensburg | urn:nbn:de:bvb:355-epub-253402 | ||||
| Dokumenten-ID | 25340 |
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